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RF Power Supply - メーカー・企業と製品の一覧

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RF power supply (high-frequency power supply)

Leave RF power (high-frequency power) and matching boxes to us.

Our company provides the design, manufacturing, sales, and technical services of high-frequency power supplies for plasma, matching units, and measuring instruments used in the manufacturing equipment for LCD substrates and semiconductor production processes. We offer a range of products, including the TX series, which has successfully achieved significant miniaturization and component standardization to shorten delivery times, as well as the TS series, which is less than one-fifth the height and weight of conventional models. 【Product Lineup (Power Supplies)】 ■ AX Series ■ TX Series ■ TS Series *For more details, please download the PDF or contact us.

  • Power Supplies

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RF Power Supply for Film Formation RFS-N Series

By incorporating a high-efficiency RF amplifier, we have achieved miniaturization and weight reduction. 【ULVAC】

The RFS-N series is an RF power supply for plasma processes with output options of 13.56MHz, 0.5kW/1kW/3kW/5kW. It achieves compactness and lightweight design by incorporating a high-efficiency RF amplifier. Additionally, it features a built-in auto-matching controller function, allowing for power control and matching system control with just the main unit. 【Product Lineup】 ○RFS-1305N/1310N ○RFS-1330N/1350N ○MBX-1305N/1310N ○MBX-1330N/1350N For more details, please contact us or download the catalog.

  • power supply

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High-frequency RF power supply / High-efficiency pulse RF power supply

High-efficiency high-frequency power supply [Low cost, energy-saving, compact design] With a reflection resistance of over 600W, it withstands rapid load fluctuations due to short circuits and open circuits.

【13.56MHz 1kW/3kW/5kW (Pulse)】 The high-efficiency high-frequency power supplies newly developed by NRF【NR1NP】【NR3NP】【NR5NP】 have significantly improved durability compared to conventional high-efficiency RF power supplies, thanks to their unique high-reliability power amplifiers. The weakness of high-efficiency amplifiers has been their structural vulnerability to reflected power; however, NRF's high-efficiency RF power supplies possess an impressive reflection resistance capability of over 600W for a 3kW output, allowing them to withstand sudden load fluctuations such as short circuits and open circuits. Additionally, they are equipped with various protection circuits, making them a model that NRF confidently recommends. = Features = ■ Compact design ■ High reflection resistance ■ High power margin ■ Operation via handy controller ■ Safety design ■ Various protection circuits ■ High efficiency The catalog provides detailed information on features and specifications by model. ↓↓↓ For more details, please download the catalog and feel free to contact us. ↓↓↓

  • CVD Equipment

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